| @ Maximum operating temperature 400℃ |
| A Fast temperature rise Rt→300℃ 1sec |
| B High speed cooling 400℃〜100℃ 2.5sec( Cooling air open exit.) |
| C Low thermal expansion 0.3μm〜 Less than 0.6μm |
| D Thermal uniformity Specified range±2% |
| E Long life |
| F Energy saving 500 W electric power with 12 mm size heater. |
| MC12(12mm□)heater performance |
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